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    1. 首頁 > 產品展示 > 濺射靶材和蒸發材料

      濺射靶材和蒸發材料

      微電熱蒸發源

      Our Micro-Electronic sources represent a full line of smaller size sources that are similar to the standard size sources in our catalog. The overall length on these sources is slightly less than 2 inches, in most cases. The smaller sources are ideal for lower power systems or processes that require small amounts of evaporants.

      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME1
      1.45
      266
      386
      1600°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME2-.005Ta
      2.52
      141
      355
      1600°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME2A-.005Ta
      0
      0
      0
      N/A
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME2B-.005Ta
      0
      0
      0
      N/A
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME3-.005Mo
      0.94
      150
      141
      1400°C
      DME3-.005Ta
      1.77
      138
      244
      1600°C
      DME3-.005W
      2
      202
      404
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME4-.005Mo
      0.94
      93
      87
      1400°C
      DME4-.005Ta
      1.5
      98
      147
      1600°C
      DME4-.005W
      1.83
      143
      262
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME5-.005Mo
      0.85
      58
      49
      1400°C
      DME5-.005Ta
      1.4
      55
      77
      1600°C
      DME5-.005W
      1.69
      80
      135
      1800°
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME6A-.005Mo
      0.85
      102
      87
      1400°C
      DME6A-.005Ta
      1.85
      95
      176
      1600°C
      DME6A-.005W
      1.83
      145
      265
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME6B-.005Mo
      0.9
      97
      87
      1400°C
      DME6B-.005Ta
      1.73
      96
      166
      1600°C
      DME6B-.005W
      1.88
      144
      271
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME7-.005Mo
      1.12
      53
      59
      1400°C
      DME7-.005Ta
      1.72
      49
      84
      1600°C
      DME7-.005W
      2.03
      76
      154
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME8-.005Mo
      1.04
      79
      82
      1400°C
      DME8-.005Ta
      2.16
      93
      201
      1600°C
      DME8-.005W
      2.57
      129
      332
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME9-.005Mo
      0.8
      72
      58
      1400°C
      DME9-.005Ta
      1.48
      67
      99
      1600°C
      DME9-.005W
      1.55
      97
      150
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME10-.005Ta
      1.07
      131
      140
      1600°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME11-.030W
      3.59
      25
      90
      1800°C
      DME11-3x.025W
      3.13
      44
      138
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME12-.030W
      2.47
      27
      67
      1800°C
      DME12-3X.025W
      2.3
      47
      108
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME13A-.030W
      1.25
      33
      41
      1800°C
      DME13A-3x.025W
      1.08
      61
      66
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME13B-.030W
      1.95
      27
      53
      1800°C
      DME13B-3X.025W
      1.68
      52
      87
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME13C-.030W
      1.95
      26
      51
      1800°C
      DME13C-3x.025W
      1.56
      53
      83
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME14-.030W
      3.21
      24
      77
      1800°C
      DME14-.040W
      2.9
      36
      104
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME15-.030W
      4.18
      23
      96
      1800°C
      DME15-.040W
      3.63
      34
      123
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME16A-.030W
      2.48
      23
      57
      1800°C
      DME16A-3x.025W
      2.31
      39
      90
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME16B-.030W
      2.9
      23
      67
      1800°C
      DME16B-3X.025W
      2.66
      42
      112
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME16C-.030W
      3.77
      23
      87
      1800°C
      DME16C-3x.025W
      3.54
      43
      152
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME16D-.030W
      5.96
      21
      125
      1800°C
      DME16D-3X.025W
      5.51
      40
      220
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME16E-.040W
      4.25
      32
      136
      1800°C
      DME16E-3x.025W
      5
      44
      220
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME17-.030W
      4.93
      22
      108
      1800°C
      DME17-3X.025W
      4.57
      40
      183
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME18A-3X.025W
      6.56
      48
      315
      1800°C
      DME18A-3x.030W
      5
      55
      275
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME18B-3x.025W
      4.7
      43
      202
      1800°C
      DME18B-3X.030W
      4.25
      56
      238
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME21-.005Mo
      0.94
      147
      138
      1400°C
      DME21-.005Ta
      1.75
      141
      247
      1600°C
      DME21-.005W
      1.96
      213
      417
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME22
      1.87
      196
      367
      1600°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME22A
      0
      0
      0
      N/A
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME22B
      0
      0
      0
      N/A
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME23-.005Mo
      0.79
      251
      198
      1400°C
      DME23-.005Ta
      1.51
      215
      325
      1600°C
      DME23-.005W
      1.4
      327
      458
      1800°C
      Part #:
      Volts:
      Amps:
      Watts:
      Temp:
      DME24-.005Mo
      0.83
      248
      206
      1400°C
      DME24-.005Ta
      1.47
      230
      338
      1600°C
      DME24-.005W
      1.66
      322
      535
      1800°C

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