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      真空零部件

      Hanks HM2 多分枝電子槍


      Hanks HM2 多分枝電子槍

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      The Hydra design consists of a compact array of crucibles and electron emitters which translate linearly with respect to each other to provide for the co-deposition of up to six different materials simultaneously.
      Hydra 的設計包括一個緊湊的坩堝陣列和相應的直線排列的電子束發射器,可以同時共蒸發多達六種不同的材料。
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      Innovative technology and a creative approach to magnetic field concepts has been fostered by Thermionics to result in several new, unique electron emission configurations. The Hydra configuration eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.
      我們引進了新技術,獨創新的磁場概念,配備獨特的電子束發射裝置,使Hydra無需復雜的電子束導向和笨重的磁場分流部件,就可以消除臨近源的相互干擾。每個源有獨立的水冷防止水汽的集結。每個源配有獨立的掃描線圈,所有的源都有獨立的參數來進行獨立操作。
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      Co-Evaporation Technology:
      共沉積技術:
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      ?? Single Array—5 crucibles, 1-3 emitters
      ?????? 單列:5個坩堝,1-3個電子束發射器
      ?? Dual Array—10 crucibles, 2-6 emitters
      ?????? 雙列:10個坩堝,2-6個電子束發射器
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      技術規格

      Maximum Power
      最大功率
      10 kW
      15 kW
      Crucible volume
      坩堝容量
      10/15 cc
      40 cc
      Emission voltage
      束電壓
      10 kV
      10 kV
      Emission current
      束電流
      0 to 1.0 A
      0 to 1.5 A
      Filament
      燈絲功率
      700 W
      700 W
      E-beam deflection
      電子束偏轉角度
      220°
      220°
      Beam spot size
      電子束斑點尺寸
      .25" diameter
      .25" diameter
      Evaporation rate?(Al)
      蒸發速率(Al)
      1 gm/min at 10 kW
      3.6 microns at 25 cm
      1.5 gm/min at 15 kW
      50,000 ? min
      X and Y sweep
      X/Y掃描
      Hyper-Unimelt Sweep (0-200 Hz)
      Hyper-Unimelt sweep (0-200 Hz)
      Water
      冷卻水
      3.0 gpm/crucible,
      common return (up to 30 gpm)
      3.0 gpm/crucible,
      common return (up to 30 gpm)
      Crucible material
      坩堝材料
      OFE copper?
      OFE copper?
      Bakeout temp
      烘烤溫度
      230°C (446°F)
      230°C (446°F)
      e-Gun size--single array
      電子槍尺寸-單列
      6.25" x 5.5" x 15"
      6.25" x 5.75" x 15"
      e-Gun size--double array
      電子槍尺寸-雙列
      6.25" x 11" x 15"
      6.25" x 11.5" x 15"

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