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      真空零部件

      IC系列大容量15kW電子槍


      IC系列大容量15kW電子槍

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      Dual ICR Installation with optional differential pumping

      Industrial Capacity electron beam evaporation sources

      Thermionics’ new ICR e-Gun? is available with capacity up to 1500cc in a carousel configuration as pictured here or as a multi-pocket e-Gun? with up to 10 each 75cc crucibles.?
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      Features
      ???????? True XY sweep with full crucible coverage
      ???????? Proprietary anti-beam curl shield for longer more productive runs.
      ???????? Rugged drive mechanism to prevent jamming
      ???????? Plug-in emitter module
      ???????? Enhanced high-stability cooling
      ???????? Built in cross-contamination shielding (multi-pocket version)
      ???????? Easy access (without disassembly) to magnetic adjustments
      ???????? Optional increased run-time features: differential pumping, gas
      bleed and dual filaments

      Specifications

      Operating pressure
      Below 5 x 10-5 Torr is desirable for best operation
      Beam voltage
      10,000 VDC
      Beam current
      0-1500 mA continuously variable
      Maximum power
      15 kW
      Cooling water
      3.5 gpm
      Pressure differential
      25 psi minimum
      Maximum bakeout temperature
      130°C
      Crucible volume
      Up to 1500cc Carousel or up to 10 x 75cc multipocket

      Ordering Information

      Description
      Model No.
      IC e-Gun? source with sweep coils, 1500cc Carousel. Bottom or Side Drive
      ICRC1500-1
      IC e-Gun? source with sweep coils, 10 x 75cc Rotary. Bottom or Side Drive
      ICR-1575-10

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