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      HCF單坩堝電子槍


      HCF單坩堝電子槍

      High Capacity Single Crucible e-Guns?
      270° Beam Deflection????????
      The High Capacity Series of e-Guns incorporates a proven 270° electron beam deflection system. The filament is hidden below and out of the line-of-sight of the crucible. This prevents ion erosion and provides maximum protection from shorting caused by stray particles or condensate.
      Long Life Emitter Assembly
      The 270° electron beam deflection design has been enhanced with a new and improved emitter assembly.
      Easy Filament Replacement
      The emitter assembly design makes removal or replacement of the filament fast and easy. A filament alignment tool maintains critical filament tolerances, allowing quick and accurate filament replacement.
      Permanent Magnet Beam Positioning
      Primary beam position is controlled by a permanent magnet. Electromagnets are used for precise positioning and beam sweep.
      UHV Compatible
      Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
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      Specifications

      Maximum power
      10 kW
      Emission voltage
      -6 to -10 kV
      Emission current
      0 to 1 A
      Filament
      700 W
      E-beam deflection
      270°
      Beam spot size
      .25" dia., tight beam
      Evaporation rate
      1 gram/min @ 10 kW, 36,000 ?/min Al @ 10" (250 mm) source to substrate distance
      X and Y sweep
      Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller
      Water
      3 gpm, 20°C, 50 psi pressure differential
      Crucible material
      OFE copper
      Bakeout temperature
      230°C (446°F)

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      Mounting Configurations
      Each e-Gun is available in three standard mounting configurations:
      1.????? e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
      2.????? e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
      3.????? e-Gun alone with no mounting flange
      Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
      Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
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      Ordering Information

      High Capacity e-Guns
      Model No.
      Description
      HCF1007
      7 cc single crucible
      HCF1015
      15 cc single crucible
      HCF1025
      25 cc single crucible
      HCF1040
      40 cc single crucible
      For further information also see:
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      Power Supplies
      ? Controllers
      ? Accessories
      ? Crucible Liners
      Option: Emitter Assembles
      Model No.
      Description
      112128-SD
      Standard
      112128-HD
      Heavy-duty
      112128-DE
      Dual filament

      Option: Spare Parts Kit
      Model No.
      Description
      HC/ERK-SD
      Standard
      HC/ERK-HD
      Heavy-duty
      HC/ERK-DE
      Dual filament

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