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      HCR旋轉電子槍


      HCR旋轉電子槍

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      HC Series Multiple Crucible Rotary e-Guns?
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      The HC Series Rotary e-Gun evaporation source delivers superior results in demanding production coating applications. The large crucible volume permits long, uninterrupted evaporation runs. Easy, quick disassembly and assembly reduce maintenance time. HCR e-Guns are designed to provide maximum service life.
      Features
      270° beam deflection
      Multiple crucibles, rotary design
      Interchangeable crucible assemblies
      Long life emitter assembly
      Easy filament replacement
      Permanent magnet beam positioning
      Integral sweep coils
      Available with bottom or side drive
      270° Beam Deflection
      The High Capacity Series of e-Guns incorporates a proven 270° electron beam deflection system. The filament is located to provide maximum protection from shorting caused by stray particles or condensate.
      Long Life Emitter Assembly
      The 270° electron beam deflection design has been enhanced with a new and improved emitter assembly.
      Easy Filament Replacement
      The emitter assembly design makes removal or replacement of the filament fast and easy. A filament alignment tool maintains critical filament tolerances during emitter assembly, allowing quick and accurate filament replacement and installation.
      Permanent Magnet Beam Positioning
      The primary beam position is controlled by a permanent magnet. Electromagnets are used for precise positioning and beam sweep.
      Interchangeable Crucibles
      The e-Gun offers interchangeable crucible blocks, available in a variety of volumes and geometries. Five standard crucible arrangements are available, offering the flexibility necessary for a wide variety of source materials, applications, and processes.
      Crucible Removal
      The rotary crucible block assemblies can be easily and quickly removed from the top of the e-Gun, for cleaning, replacement, and/or changing the crucible block assembly.
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      Specifications
      Maximum power
      10 kW
      Emission voltage
      -6 to -10 kV
      Emission current
      0 to 1 A
      Filament
      700 W
      E-beam deflection
      270°
      Beam spot size
      .25" dia., tight beam
      Evaporation rate
      1 gram/min @ 10 kW
      36,000 ?/min Al @10" (250 mm) source to substrate distance
      X and Y sweep
      Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller
      Water
      3 gpm, 20°C, 50 psi pressure differential
      Crucible material
      OFE copper
      Bakeout temperature
      120°C (250°F)
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      Mounting Configurations
      Each e-Gun is available in three standard mounting configurations:
      1. e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
      2. e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
      3. e-Gun alone with no mounting flange
      Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
      Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
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      Ordering Information
      Description
      Crucible Size in
      Cubic Centimeters
      No. of Crucibles
      Model No.
      4 crucible, side drive
      7
      4
      HCR0607-4-SD
      4 crucible, bottom drive
      7
      4
      HCR0607-4-BD
      4 crucible, side drive
      15
      4
      HCR1015-4-SD
      4 crucible, bottom drive
      15
      4
      HCR1015-4-BD
      4 crucible, side drive
      25
      4
      HCR1025-4-SD
      4 crucible, bottom drive
      25
      4
      HCR1025-4-BD
      4 crucible, side drive
      40
      4
      HCR1040-4-SD
      4 crucible, bottom drive
      40
      4
      HCR1040-4-BD
      6 crucible, side drive
      7
      6
      HCR0607-6-SD
      6 crucible, bottom drive
      7
      6
      HCR0607-6-BD
      6 crucible, side drive
      15
      6
      HCR1015-6-SD
      6 crucible, bottom drive
      15
      6
      HCR1015-6-BD
      6 crucible, side drive
      25
      6
      HCR1025-6-SD
      6 crucible, bottom drive
      25
      6
      HCR1025-6-BD
      8 crucible, side drive
      7
      8
      HCR1007-8-SD
      8 crucible, bottom drive
      7
      8
      HCR1007-8-BD
      8 crucible, side drive
      10
      8
      HCR1010-8-SD
      8 crucible, bottom drive
      10
      8
      HCR1010-8-BD
      Rotary carousel, continuous trough crucible, side drive
      320
      360° trough
      HCRC320-1-SD
      Rotary carousel, continuous trough crucible, bottom drive
      320
      360° trough
      HCRC320-1-BD
      Rotary pan-type carousel, side drive
      360
      360° pan
      HCRP360-1-SD
      Rotary pan-type carousel, bottom drive
      360
      360° pan
      HCRP360-1-BD

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