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      真空零部件

      HCL線形電子槍


      HCL線形電子槍

      High Capacity Multiple Crucible Linear e-Guns?
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      The HC Series Linear e-Gun is an all metal-sealed e-Gun. Available in 4 and 5 crucible versions, the source allows sequential deposition of up to 5 materials. Standard mounting is on a 12" O.D. Conflat-type flange and includes auto indexer and all mechanical and electrical connections.
      UHV Compatible
      Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
      270° Beam Deflection
      The filament is completely hidden to ensure maximum protection from shorting caused by stray particles.
      Easy Filament Replacement
      A filament alignment tool maintains critical filament tolerances during emitter assembly allowing quick and accurate filament replacement.
      Permanent Magnet Beam Positioning
      The primary beam position is controlled by a permanent magnet; electromagnets are used only for precise positioning and beam sweep.
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      Features
      ? 4- and 5-crucible models
      ? 12" O.D. CF mounting flange
      ? Includes all electrical and utility feedthroughs
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      Specifications

      Maximum power
      10 kW
      Emission voltage
      -6 to -10 kV
      Emission current
      0 to 1 A
      Filament
      700W
      E-beam deflection
      270°
      Beam spot size
      Approx. .25" dia. tight beam
      Evaporation rate
      1 gram/min @ 10 kW, 36,000 ?/min Al @ 10" (250 mm) source to substrate distance
      Water
      3 gpm, 25 psi pressure differential
      Crucible material
      OFE copper
      Bakeout temperature
      230°C

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      Mounting Configurations
      Each e-Gun is available in three standard mounting configurations:
      1.????? e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
      2.????? e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
      3.????? e-Gun alone with no mounting flange
      Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
      Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
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      Ordering Information for HC Series Linear e-Guns

      Power
      Crucible Size (cm3)
      No. of Crucibles
      Model No.
      6 kW
      7
      4
      HCL0607-4
      7
      5
      HCL0607-5
      15
      4
      HCL0615-4
      15
      5
      HCL0615-5
      25
      4
      HCL0625-4
      10 kW
      40
      4
      HCL1040-4
      40
      5
      HCL1040-5
      15 kW
      75
      4
      HCL1575-4
      75
      5
      HCL1575-5

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